RF Generator with auto-impedance matching netwok

This RF Generator is widely used in semiconductor processing, plasma etching, thin film deposition, physical vapor deposition, and sputtering — especially when paired with an Impedance Matching Unit. Known for its durability and performance, our generator has been trusted and tested across several government R&D institutes.

We are committed to delivering reliable after-sales service to ensure complete customer satisfaction.

Technical Specifications:

• Output Forward Power: 0 – 300 Watt
  
• Reflected Power: 0 – 150 Watt
  
• Carrier Frequency: 13.56 MHz
  
• Harmonic: -30 dBc below fundamental
  
• Output Impedance: 50 Ohm
  
• Output Connector: N type Female
  Display of capacitor match point position Display of Interlock fault status

• Cooling System: Convection Air Cooling
  
• Dimensions (L×W×H): 47.5 × 30.0 × 8.5 cm
  

Applications:

✔️ Semiconductor Processing

✔️ Plasma Etching

✔️ Thin Film Deposition

✔️ Physical Vapor Deposition (PVD)

✔️ Sputtering

Used in semiconductor processing, plasma etching, thin film deposition, physical vapor deposition and sputtering when used along with RF Generators. Our tuners have proven track record of durability in various government R&D institutes. We are committed to customer satisfaction with our after sales service support.

Technical Specifications:

• RF Power: 600 W

• Frequency: 13.56 MHz

• Load Impedance: [0-50] + [(-j470) to (+j250)] Ohm
  Automatic & manual modes for tuning capacitors

• RF i/p connector: 50 Ohm N-type Female

• Cooling: Forced air cooling

• Interface with RF Generator: 15 Pin D-Connector

• RF o/p connector: UHF connector/ Screw type terminal
  

The RF Generator with impedance matching network is warrantied for 12 months from the date of purchase for manufacturing defects. We do not undertake any warranty for the external or internal damages caused by mishandling at the same time.